E11100 - SEMI E111 - Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle Revision:SEMI E111-1101 - Superseded and flatness

and flatness

本スタンダードは2003年10月に編集上の修正がなされた。§§§3

This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers

装置設計に適用される静電気の制御方法は，半導体製造施設内の静電気に関連するすべての問題を解決するものではない。施設内の製品またはレチクルの輸送は静電気の影響を受け，静電気問題の原因となる。製造施設内で動き回る人も静電気の発生源となる。これらの施設の問題はSEMI E129で述べている。

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E11100 - SEMI E111 - Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle Revision:SEMI E111-1101 - Superseded and flatnessNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given